1. IC Fabrication
... must be carried out involving human sight and negative resist is used to provide visible pattern. Most of the industry use positive tone photolithography processing. This is because it is aqueous based and can be easily be disposed. This is an obvious advantage over the usage of the negative tone, which used more solvent and thus contributing the problem of industrial ... size of wafers become bigger as well and the reduction of variation of thickness to satisfactory will be a problem. Developer Area on the mask will be removed via the developing solution. Hard bake The process took app...
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- Grade Level: High School